Advancements in materials fabrication and metrology have played a crucial role in the ongoing development and miniaturization of high-performance electronic and photonic devices. My research program focus on applying fundamental discovery of science and technology to the new manufacturing process and related device applications, including 1) an atomic layer precision etching, doping, synthesis, ii) a high-throughput, high-resolution 3D additive manufacturing, and iii) wafer-scale multimodal characterization and data-driven prediction of device failure and process optimization. These innovations will bridge the gap between fundamental discoveries in nanoscience and technology and practical, commercially viable devices with unprecedented performances, and ultimately facilitate “nanotechnology from lab to industry”.